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kSA Newsletter No. 29, Qtr3 2015

Attention Veeco K465i and EPIK700 Users: Full Wafer Carrier Temperature Mapping Now Available!

k-Space Associates is pleased to announce the global release of kSA ScanningPyro. This tool is designed to quickly, easily, and accurately generate full carrier temperature maps on Veeco K465i and EPIK700 production MOCVD reactors.

Since the slit-style viewports on these reactors do not extend from the center to outer edge of the wafer carrier, automated temperature mapping tools have generally missed some areas of the carrier or required hardware changes in order to complete the scan. kSA ScanningPyro solves this problem by using a unique scanning pyrometer optical head with two angled pyrometers that allow access to both the center and the edge of the wafer carrier. This solution allows the automated acquisition of a full carrier temperature map in less than two minutes. This tool greatly enhances the user’s ability to assess the performance of both carriers and heaters in order to perform further process optimization.

To learn more, please click here or email us at requestinfo@k-space.com.

Real-Time Stress Measurements in Lithium-Ion Battery Negative-Electrodes

Many readers are aware of kSA MOS system’s usefulness for monitoring in situ stress during thin-film deposition via MBE, MOCVD, PVD, and ALD, but may not be aware of its use in battery research. One such use of kSA MOS is highlighted in “Real-time stress measurements in lithium-ion battery negative-electrodes,” by V.S. Sethuraman, N. Van Winkle, D.P. Abraham, A.F. Bower, and P.R. Guduru in the Journal of Power Sources. This paper shows the stress evolution in composite electrodes during electrochemical-cycling and electrolyte-wetting measured by the kSA MOS. In another paper, “In situ Measurement of Biaxial Modulus of Si Anode for Li-ion Batteries” published in Electrochemistry Communications by V.S. Sethuraman, M.J. Chon, M. Shimshak, N. Van Winkle, and P.R. Guduru, the in-situ stress of the lithiated-silicon electrode measured using the kSA MOS was used to determine the biaxial modulus of such electrodes as a function of lithium concentration.

Are you using kSA MOS in a unique way? If so, we’d love to hear about it! Please contact us at requestinfo@k-space.com with details.

Sandia National Laboratories Installs kSA ICE Tool

Sandia National Laboratories recently installed a kSA ICE tool on a modified EMCORE D-125 MOCVD reactor. The kSA Integrated Control for Epitaxy (kSA ICE) tool is a modular in situ metrology system capable of measuring multi-wafer real-time temperature, reflectivity, growth rate, film stress and substrate curvature during MOCVD processes.

Sandia's system also features reflectivity at a wavelength of 405 nm, in addition to reflectivity at longer wavelengths of 660 and 960 nm.

Click here to read more.

Introducing kSA SpectraTemp

kSA SpectraTemp is a non-contact, optically-based metrology tool for measuring the temperature of semiconductor wafers, metals, ceramics, and much more. It is based on k-Space patented technology that analyzes the spectral radiation profile utilizing a solid-state spectrometer, resulting in fast data acquisition and real-time temperature measurement. The user simply reads the temperature from the screen. And unlike a pyrometer, kSA SpectraTemp can tell you the confidence level of the temperature measurement.

To learn more, please email us requestinfo@k-space.com.

Attending NAMBE 2015? Win an iPad Mini 3!

Are you headed to Mexico for NAMBE 2015? If so, please stop by the k-Space booth to complete a short survey and enter our drawing to win an iPad Mini 3! The iPad winner will be announced by email on Tuesday night and the winner can pick up his/her prize from 9AM - 11AM on Wednesday morning at the k-Space booth. We hope to see you there!

Come Visit k-Space at the Following Conferences!

North American Molecular Beam Epitaxy Conference (NAMBE 2015) - Oct. 2015

The 6th International Symposium on Growth of III-Nitrides (ISGN) - Nov. 2015

Semicon Japan 2015 - Dec. 2015

Stop by our booth to see kSA's latest product offerings!

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