kSA Newsletter No. 27, Qtr 1 2015
k-Space Completes Successful Phase II SBIR Effort
k-Space has successfully completed a Phase II SBIR effort with the U.S. Army Research Laboratory.  This effort focused on in-situ, real-time metrology for monitoring the deposition of materials for IR applications. The integrated metrology tool developed under this effort allows for simultaneous, real-time monitoring of substrate temperature (over a large temperature range), substrate curvature, film stress, and growth rate during deposition. The project is outlined on the U.S. SBIR website at http://www.sbir.gov/sbirsearch/detail/385441. Below we show the evolution of the in-situ stress during a growth and annealing cycle.
k-Space Partners with SUNY for Improved MOCVD Process Control
k-Space Associates, Inc. and the Colleges of Nanoscale Science and Engineering (CNSE) at SUNY Polytechnic Institute (SUNY Poly) announce a joint collaborative effort in III-Nitride materials research. The focus of this collaboration is to improve III-Nitride material quality, growth parameters, and device performance through the use of the kSA Integrated Control for Epitaxy tool (kSA ICE) to provide in-situ measurements of film stress, temperature, and growth rate. 
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Platen Temperature Uniformity Measurement Capability Added to LBNL MBE Reactor
Lawrence Berkeley National Laboratory needed a system to provide maps of temperature uniformity across their platen. They needed 100mm Si substrate temperature monitoring and mapping on an SVT MBE system at a temperature of approximately 300⁰C. They found success with the kSA BandiT with scanning option. Craig Tindall, Staff Scientist at Lawrence Berkeley, appreciated the power of the tool and said, “Thanks again to you and your colleagues for making such a great instrument.  It really fulfills a critical need in my process.”

kSA BandiT and kSA 400 in Action
Watch this video featuring Robert Sacks of Picometrix to discover a solution for low temperature substrate growth measurement! Thanks Bob for your inspired tutorial!
Short Course Features kSA MOS at the 42nd ICMCTF
Dr. Gregory Abadias, Professor of Physics and Material Science at University of Poitiers, will be giving a short course at the 42nd International Conference on Metallurgical Coatings and Thin Films (ICMCTF). The title of the short course is "Understanding and Control of Stresses in PVD Thin Films". Dr. Abadias is a long time user of the kSA MOS tool for measuring in-situ film stress. k-Space will be supplying a kSA MOS tool for the demonstration. 
Come Visit k-Space at the Following Tradeshows to See the Newest kSA Products in Action!
Japan Society of Applied Physics - March 2015
18th European Molecular Beam Epitaxy Workshop - March 2015
International Conference On Metallurgical Coatings & Thin Films - April 2015
Stop by the booth and see the latest product offerings and demonstration equipment.  We take pride in always being available to chat – please don’t hesitate to give us a call or send us an email with any questions, concerns, or suggestions!

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